| 000 | 01159nam a2200325 a 4500 | ||
|---|---|---|---|
| 008 | |||
| 020 | _a9781437734836 (hardback) | ||
| 040 |
_aNUST _cNUST |
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| 049 | _aMAIN | ||
| 090 |
_aREF TS695 _bHAN |
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| 245 | 1 | 0 |
_aHandbook of sputter deposition technology : _bfundamentals and applications for functional thin films, nanomaterials, and MEMS/ _cedited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera. |
| 250 | _aSecond edition. | ||
| 260 |
_aWaltham, U.S.A : _bWilliam Andrew, _c24 cm. |
||
| 300 |
_axii, 644 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 500 | _aIncludes index. | ||
| 650 | 1 | _aCathode sputtering (plating process). | |
| 650 | _aThin films. | ||
| 650 | _aMicroelectromechanical systems. | ||
| 650 | _aNanostructured materials. | ||
| 700 |
_aWasa, Kiyotaka., _aeditor. |
||
| 700 |
_aKanno, Isaku., _aeditor. |
||
| 700 |
_aKotera, Hidetoshi., _aeditor. |
||
| 907 |
_a.b10403474 _b19-10-21 _c03-06-21 |
||
| 003 | |||
| 005 | 20230123141220.0 | ||
| 942 |
_cBOOKS _kREF TS695 _mHAN |
||
| 999 |
_c169677 _d169677 |
||