000 00713nam a2200253 a 4500
008
020 _a0412465906 (pbk.)
049 _aMAIN
050 0 0 _aQC166
_bDEL
100 1 _aDelchar, T. A.
245 1 0 _aVacuum physics and techniques /
_cT. A. Delchar.
260 _aLondon :
_bChapman & Hall,
_c1993.
300 _aviii, 253 p. :
_bill. ;
_c22 cm.
440 0 _aPhysics and its applications ;
_v6.
504 _aIncludes bibliographical references.
500 _aIncludes index.
650 0 _aVacuum.
650 0 _aVacuum technology.
907 _a.b10106261
_b02-03-09
_c13-01-04
003
005 20230123133600.0
040 _cNUST
942 _cBOOKS
999 _c151087
_d151087