Handbook of sputter deposition technology
fundamentals and applications for functional thin films, nanomaterials, and MEMS
Wasa, Kiyotaka., editor.
Kanno, Isaku., editor.
Kotera, Hidetoshi., editor.
text
Waltham, U.S.A
William Andrew
24 cm
Second edition.
monographic
xii, 644 pages : illustrations ; 24 cm.
edited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera.
Includes index.
Cathode sputtering (plating process)
Thin films
Microelectromechanical systems
Nanostructured materials
9781437734836 (hardback)
NUST
20230123141220.0