01159nam a2200325 a 4500 9781437734836 (hardback) NUST NUST MAIN REF TS695 HAN Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS/ edited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera. Second edition. Waltham, U.S.A : William Andrew, 24 cm. xii, 644 pages : illustrations ; 24 cm. text txt rdacontent unmediated n rdamedia volume nc rdacarrier Includes index. Cathode sputtering (plating process). Thin films. Microelectromechanical systems. Nanostructured materials. Wasa, Kiyotaka., editor. Kanno, Isaku., editor. Kotera, Hidetoshi., editor. .b10403474 19-10-21 03-06-21 20230123141220.0 BOOKS REF TS695 HAN 169677 169677 2023-01-23 00:00:00 0 REF TS695 HAN 922004048272 80.00 2023-01-23 BOOKS 0 LCC 0 0 NFIC 0 MAIN MAIN GEN 2023-01-23 80.00