00988nam a2200265 a 4500008004100000020002900041040001500070245019000085250002000275260004700295300004600342336002600388337002800414338002700442500002000469650004200489650001600531650003600547650003000583700003000613700002800643700003300671003000100704005001700705                                          a9781437734836 (hardback)  aNUSTcNUST10aHandbook of sputter deposition technology :bfundamentals and applications for functional thin films, nanomaterials, and MEMS/cedited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera.  aSecond edition.  aWaltham, U.S.A :bWilliam Andrew, c24 cm.  axii, 644 pages :billustrations ;c24 cm.  atextbtxt2rdacontent  aunmediatedbn2rdamedia  avolumebnc2rdacarrier  aIncludes index. 1aCathode sputtering (plating process).  aThin films.  aMicroelectromechanical systems.  aNanostructured materials.  aWasa, Kiyotaka.,aeditor.  aKanno, Isaku.,aeditor.  aKotera, Hidetoshi.,aeditor.20230123141220.0