TY  - BOOK
AU  - Wasa, Kiyotaka.,
AU  - Kanno, Isaku.,
AU  - Kotera, Hidetoshi.,
TI  - Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nanomaterials, and MEMS
SN  - 9781437734836 (hardback)
PY  - 0000///24 cm
CY  - Waltham, U.S.A
PB  - William Andrew, 
KW  - Cathode sputtering (plating process)
KW  - Thin films
KW  - Microelectromechanical systems
KW  - Nanostructured materials
N1  - Includes index
ER  -