TY  - BOOK
AU  - Delchar,T.A.
TI  - Vacuum physics and techniques
SN  - 0412465906 (pbk.)
AV  - QC166 DEL
PY  - 1993///
CY  - London
PB  - Chapman & Hall
KW  - Vacuum
KW  - Vacuum technology
N1  - Includes index; Includes bibliographical references
ER  -