Delchar, T. A.

Vacuum physics and techniques / T. A. Delchar. - London : Chapman & Hall, 1993. - viii, 253 p. : ill. ; 22 cm. - Physics and its applications ; 6. .

Includes index.

Includes bibliographical references.

0412465906 (pbk.)


Vacuum.
Vacuum technology.

QC166 / DEL