Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS/ edited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera.

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TextPublication details: Waltham, U.S.A : William Andrew, 24 cm.Edition: Second editionDescription: xii, 644 pages : illustrations ; 24 cmContent type:

text

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unmediated

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volume

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9781437734836 (hardback)

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Ordinary Loan Books

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	Ordinary Loan Books	Main Library		NFIC		REF TS695 HAN (Browse shelf(Opens below))					Available			92004048331

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Includes index.

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