Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS/ edited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera.
Material type:
TextPublication details: Waltham, U.S.A : William Andrew, 24 cm.Edition: Second editionDescription: xii, 644 pages : illustrations ; 24 cmContent type: - text
- unmediated
- volume
- 9781437734836 (hardback)
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Main Library | NFIC | REF TS695 HAN (Browse shelf(Opens below)) | Available | 92004048045 |
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Includes index.
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