Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS/

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS/ edited by Kiyotaka Wasa ; Isaku Kanno & Hidetoshi Kotera. - Second edition. - Waltham, U.S.A : William Andrew, 24 cm. - xii, 644 pages : illustrations ; 24 cm.

Includes index.

9781437734836 (hardback)


Cathode sputtering (plating process).
Thin films.
Microelectromechanical systems.
Nanostructured materials.